Proofread backwards. Begin at the end and work back...paragraphy by paragraph or even line by line. This will force you to look at the surface elements rather than the meaning...
Try to make a break between writing and proofreading. Set [it] aside for the night—or even for twenty minutes.
Proofread once aloud. This will slow you down and you will hear the difference between what you meant to write and what you actually wrote.
Ask someone else to read over your paper and help you find sentences that aren't clear, places where you're being wordy, and any errors.
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